Abstract:The MEMS accelerometer is a closed-loop system. In order to meet the stability, speediness, etc., compensator circuit is required. In engineering projects, difference in MEMS sensor is obvious. Based on control theory and engineering experiments, this paper analyses the sensors which are divided with different amplitude-frequency characteristics. It will provide good stability margin in full scale range while meeting the bandwidth requirements. More special, all the compensator circuits mentioned in this paper use only two operational amplifiers, in order to reduce the circuit complication. According to many experiment, these methods have good results in improving stability and controlling the bandwidth of MEMS accelerometers.